Under normal circumstances, any pump capable of discharging air directly can be used as a low vacuum pump, such as a reciprocating vacuum pump, a rotary vane vacuum pump, a fixed vane vacuum pump, a slide valve pump, a screw pump, a water jet pump, and an air jet pump. However, from the aspects of structure, extraction of dust gas, operation and maintenance costs, the use of water ring vacuum pumps for primary vacuum pumps is more appropriate. The water ring vacuum pump can also be used as a furnace shell pump in the distillation process, eliminating the need to configure a furnace shell pump for the system. Water ring pump characteristic curve b. Use the slide valve pump as the foreline pump for primary vacuum and high vacuum. Practice shows that due to the tight oil seal, the slide valve pump is reliable and durable. In the range of atmospheric pressure to 100 Pa, it not only has a large pumping speed, but also can remove a small amount of dust gas, plus the transmission part has taken a forced lubrication, making the operation both Convenient and safe, the titanium smelting industry uses this pump. H-70 and H-150 characteristic curve c. Use ZK series oil expansion pump as high vacuum pump. The ultimate vacuum degree of the ZK series oil augmentation pump is 10Pa, which can meet the vacuum degree requirement of titanium sponge distillation. Compared with the oil diffusion pump, the ZK series oil expansion pump is close to 0.1 Pa and has a large pumping speed. Moreover, the intermediate pump and the foreline pump are easy to match.

The ZJP Roots pump is used as a booster pump for the ZK oil augmentation pump. The oil expansion pump outlet pressure is generally 30Pa ~ 40Pa, ZJP Roots 10Pa pumping speed in the peak, and the exhaust gas pressure up to 3000Pa. Therefore, the pumped gas after Roots pump pressurization, can make the former stage Spool valve pumps can operate in the optimal range. In addition, when the system pressure is in the range of 100 Pa to 0.1 Pa, the pump can directly pump the system, which can make up for the shortcomings of the low vacuum pump and the high vacuum pump in this interval. Vacuum pump consisting of vacuum unit, the working steps are: inlet pressure /Pa pumping inlet pressure /Pa pumping inlet pressure /Pa1) When the furnace pressure is stronger than 3000Pa, the airflow is turbulent, contains more dust, the gas path is : The condenser dust collector buffer tank water ring pump fully utilizes the features of the water ring pump to remove dust.